Urbach, H. P.
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Vol 6 (2011) - Regular papers
Scalar Readout Model for Super-Rens Focused Spot
Abstract PDF -
Vol 7 (2012) - Regular papers
Scanning effects in coherent fourier scatterometry
Abstract PDF
Journal of the European Optical Society:Rapid publications - ISSN 1990-2573. JEOS:RP is subject to the EOS General Terms and Conditions. |