Burger, S., Zuse Institute Berlin (ZIB), Takustrasse 7, D-14195 Berlin, Germany, Germany
-
Vol 10 (2015) - Regular papers
Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
Abstract PDF
Journal of the European Optical Society:Rapid publications - ISSN 1990-2573. JEOS:RP is subject to the EOS General Terms and Conditions. |