Jacquot, M., Département d’Optique P.M. Duffieux, Institut FEMTO-ST, UMR 6174 CNRS Université de Franche-Comté, 25030 Besancon Cedex, France, France

• Vol 8 (2013) - Regular papers
  Direct machining of curved trenches in silicon with femtosecond accelerating beams
  Abstract  PDF