Wang, J., Chengdu Fine Optical Engineering Research Centre, Chengdu, 610041, China, China
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Vol 10 (2015) - Regular papers
Deterministic measurement and correction of the pad shape in full-aperture polishing processes
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Journal of the European Optical Society:Rapid publications - ISSN 1990-2573. JEOS:RP is subject to the EOS General Terms and Conditions. |