Journal of the European Optical Society - Rapid publications, Vol 7 (2012)

Novel concept for three-dimensional polymer waveguides for optical on-chip interconnects

M. Schröder, M. Bülters, C. von Kopylow, R. B. Bergmann


We present a simulation study and first experimental implementations for a novel polymer three-dimensional waveguide design. The structures described here allow for new concepts of on-chip communication. By using direct laser writing, free-formed polymer structures can be realized directly on the surface of integrated circuits on wafer- or die-level. Further photonic structures like waveguides, resonators, splitters and couplers can be realized with an extended freedom of design to the third dimension. Our approach opens new possibilities for optical interconnects and routing for on-chip signal transmission with a high fill factor and CMOS compatibility.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2012.12027]

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