Novel concept for three-dimensional polymer waveguides for optical on-chip interconnects

M. Schröder; M. Bülters; C. von Kopylow; R. B. Bergmann

doi:10.2971/jeos.2012.12027

Journal of the European Optical Society - Rapid publications, Vol 7 (2012)

Novel concept for three-dimensional polymer waveguides for optical on-chip interconnects

M. Schröder, M. Bülters, C. von Kopylow, R. B. Bergmann

Abstract

We present a simulation study and first experimental implementations for a novel polymer three-dimensional waveguide design. The structures described here allow for new concepts of on-chip communication. By using direct laser writing, free-formed polymer structures can be realized directly on the surface of integrated circuits on wafer- or die-level. Further photonic structures like waveguides, resonators, splitters and couplers can be realized with an extended freedom of design to the third dimension. Our approach opens new possibilities for optical interconnects and routing for on-chip signal transmission with a high fill factor and CMOS compatibility.

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References

D. A. B. Miller, "Optical interconnects to electronic chips," Appl. Optics 49, 59-70 (2010).

A. Biberman, B. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, "Broadband Operation of Nanophotonic Router for Silicon Photonic Networks-on-Chip," IEEE Photonic. Tech. L. 22, 926-928 (2010).

B. Yang, L. Yang, R. Hu, Z. Sheng, D. Dai, Q. Liu, and S. He, "Fabrication and Characterization of Small Optical Ridge Waveguides Based on SU-8 Polymer," J. Lightwave Technol. 27, 4091-4096 (2009).

T. Grossmann, S. Schleede, M. Hauser, T. Beck, M. Thiel, G. von Freymann, T. Mappes, and H. Kalt, "Direct laser writing for active and passive high-Q polymer microdisks on silicon," Opt. Express 19, 11451-11456 (2011).

A. Shacham, K. Bergman, and L. Carloni, "Photonic Networks-on- Chip for Future Generations of Chip Multiprocessors," IEEE T. Comput. 57, 1246-1260 (2008).

H.-P. Nolting, and R. März, "Results of Benchmark Tests for Different Numerical BPM Algorithms," J. Lightwave Technol. 13, 216-224 (1995).

Y. Tsuji, M. Koshiba, and T. Shiraishi, "Finite Element Beam Propagation Method for Three-Dimensional Optical Waveguide Structures," J. Lightwave Technol. 15, 1728-1734 (1997).

I. Munteanu, M. Timm, and T. Weiland, "It's About Time," IEEE Microw. Mag. 11, 60-69 (2010).

N. Anscombe, "Direct laser writing," Nat. Photonics 4, 22-23 (2010).

M. Thiel, J. Fischer, G. von Freymann, and M. Wegener, "Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532 nm," Appl. Phys. Lett. 97, 221102 (2010).

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444-447 (2004).

K. Busch, G. von Freymann, S. Linden, S. F. Mingaleev, L. Tkeshelashvili, and M. Wegener, "Periodic nanostructures for photonics," Phys. Rep. 444, 101-202 (2007).

A. Borreman, S. Musa, A. Kok, M. Diemeer, and A. Driessen, "Fabrication of Polymeric Multimode Waveguides and Devices in SU-8 Photoresist Using Selective Polymerization," in IEEE/LEOS Benelux Chapter 2002 Annual Symposium 83-86 (Vrije Universiteit Amsterdam, Amsterdam, 2002).