Accuracy of the subsurface damage parameters calculated by the finite difference algorithm

H. Wang; G. Fu; L. Xiao; H. Chen; H. Xiao

doi:10.2971/jeos.2015.15056

Journal of the European Optical Society - Rapid publications, Vol 10 (2015)

Accuracy of the subsurface damage parameters calculated by the finite difference algorithm

H. Wang, G. Fu, L. Xiao, H. Chen, H. Xiao

Abstract

An important approach to characterize the full three-dimensional information of subsurface damage is to simulate the etching process of a sample reversely. The simulation starts from the morphology of the sample after the subsurface damage micro cracks being opened totally. During the etching experiment, it is possible for us to get the surface morphology at any moment. This paper presents a finite difference algorithm to simulate the morphology evolution during the etching process and then the surface’s morphology of the sample at a specific time can be obtained. Comparison between the simulated morphology and the measured one provides the clue of improving the precision of the finite difference algorithm. This method is kind of the fast calculation. In addition, the accuracy of this calculation of the corrosion model needs to be ensured. In order to improve the precision of calculation, the time interval should be set as the appropriate value by comparison and analysis. In this paper, the accuracy can be calculated through comparing the simulated result with the experimental result, and the maximum error of this method can be gained.

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References

P. P. Hed, D. F. Edwards, and J. B. Davis, Subsurface damage in optical materials: Origin, measurement & removal (Optical Fabrication and Testing Workshop, Santa Clara, 1988).

J. Wang, Y. Li, J. Han, Q. Xu, and Y. Guo, ”Evaluating subsurface damage in optical glasses,” J. Eur. Opt. Soc.-Rapid 6, 11001 (2011).

Y. Li, H. Huang, R. Xie, H. Li, Y. Deng, X. Chen, J. Wang et al., ”A method for evaluating subsurface damage in optical glass,” Opt. Express 18, 17180–17186 (2010).

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, ”The distribution of subsurface damage in fused silica,” Proc. SPIE 5991, 599101 (2005).

J. C. Lambropoulos, ”From abrasive size to subsurface damage in grinding,” Convergence 8, 1–3 (2000).

W. B. Williams, B. A. Mullany, W. C. Parker, P. J. Moyer, and M. H. Randles, ”Using quantum dots to tag subsurface damage in lapped and polished glass samples,” Appl. Optics 48, 5155–5163 (2009).

M. Trost, T. Herffurth, and D. Schmitz, ”Evaluation of subsurface damage by light scattering techniques,” Appl. Optics 10, 6579–6588 (2013).

T. Suratwala, P. Miller, M. Feit, and J. Menapace, ”Scratch forensics,” Opt. & Photo. News 20, 12–15 (2008).

A. Esmaeilzare, A. Rahimi, and S. M. Rezaei ”Investigation of Subsurface damages and surface roughness in grinding process of Zerodur ®glass-ceramic,” Appl. Surf. Sci. 14, 67–75 (2014).

H. Wang, C. Guan, B. Zhang, Z. Qiao, Y. Zhao, B. Li, and Z. Jiang, ”Investigation on the 3D information of the micro cracks within the subsurface damages by finite difference method,” Proc. NanoMan, 232–236 (2012).

L. Wong, T. Suratwala, M. D. Feit, P. E. Miller, and R. Steele, ”The effect of HF/NH4F etching on the morphology of surface fractures on fused silica,” J. Non-Cryst. Solids 355, 797–810 (2009).