Journal of the European Optical Society - Rapid publications, Vol 7 (2012)

High NA diffractive array illuminators and application in a multi-spot scanning microscope

B. Hulsken, D. Vossen, S. Stallinga

Abstract


Array illuminators generating spots with high NA at high efficiency are presented. They are designed via application of high-NA scalar optics methods, and implemented as periodic binary phase structures. These array illuminators are used in a multi-spot scanning microscope for scanning large sample areas at high resolution with a relatively high resolution.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2012.12026]

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