Development and experimental validation of a versatile prototype Swing Arm Profilometer for measuring optical surfaces

H. Jing; Z. Lin; L. Ma; S. Wu; F. Wu

doi:10.2971/jeos.2011.11052

Journal of the European Optical Society - Rapid publications, Vol 6 (2011)

Development and experimental validation of a versatile prototype Swing Arm Profilometer for measuring optical surfaces

H. Jing, Z. Lin, L. Ma, S. Wu, F. Wu

Abstract

A versatile prototype Swing Arm Profilometer (SAP) is developed and experimentally validated in the Institute of Optics and Electronics (IOE), Chinese Academy of Sciences (CAS). The configurations for the SAP are introduced. The measurement principles for measuring plano, spherical and aspherical mirrors are given. Four validation experiments are performed on the prototype SAP using plano, spherical and aspherical mirror samples. The measurement uncertainty for the current prototype SAP is 0.5micro

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