Journal of the European Optical Society - Rapid publications, Vol 6 (2011)

Evaluating subsurface damage in optical glasses

Y. Lee


Hard brittle materials (e.g. glasses and ceramics) increasingly appeal to general interests because of their excellent physical, mechanical and chemical properties such as super hardness and strength at extreme temperature and chemical stability. The precision manufacturing of these materials is primarily achieved by grinding and polishing, which generally employs abrasives to wear the materials. With this manufacturing technology, the materials are removed due principally to the fracture of brittle materials, which will leave a cracked layer on the surface of manufactured components, namely subsurface damage (SSD). The subsurface damage affects the strength, performance and lifetime of components. As a result, investigation into the subsurface damage is needed. A host of characterizing techniques have been developed during the past several decades. These techniques based on different mechanisms provide researchers with invaluable information on the subsurface damage in various materials. In this article the typical SSD evaluation techniques are reviewed, which are regularly used in optical workshops or laboratories.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2011.11001]

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RM. Wood, "Laser-induced damage of optical materials" Institute of Physics publishing series in optics and optoelectronics , Bristol and Philadelphia, (2003).

R.A. House, J.R. Bettis, and A.H. Guenther, "Subsurface structure and laser damage threshold" IEEE J. Quant. Electr. QE-13, 363-365 (1977).

N. Bloembergen, "Role of cracks, pores, and absorbing inclusions on laser induced damage threshold at surfaces of transparent dielectrics" Appl. Opt. 12, 661-664 (1973).

J.H. Campbell, "Damage resistant optical glasses for high power lasers: A continuing glass science and technology challenge" UCRL-JC-149843 (2002).

T. Kasai, "Machining and processing technologies and quality of silicon wafer surfaces" J. Surf. Sci. Soc. Jpn. 21, 688-695 (2000) in Japanese.

P.P. Hed, D.F. Edwards, and J.B. Davis, "Subsurface damage in optical materials: Origin, measurement & removal" UCRL-99548 (1988).

J. Neauport, C. Ambard, H. Bercegol, O. Cahuc, J. P. Champreux, J. L. Charles, P. Cormont et al., "Optimizing fused silica polishing processes for 351 nm high power laser application" in Proc. SPIE 7132, 71321I (2008).

J. Neauport, C. Ambard, P. Cormont, N. Darbois, J. Destribats, C. Luitot, and O. Rondeau, "Subsurface damage measurement of ground fused silica parts by HF etching techniques" Opt. Express 17, 20448-20456 (2009).

D. Golini, and S.D. Jacobs, "Physics of loose abrasive microgrinding" Appl. Opt. 30, 2761-2777 (1991).

P.P. Hed, and D.F. Edwards, "Optical glass fabrication technology. 2: Relationship between surface roughness and subsurface damage" Appl. Opt. 26, 4677-4680 (1987).

W.J. Rupp, "Mechanism of the Diamond Lapping Process" Appl. Opt. 13, 1264-1269 (1974).

J. C. Lambropoulos, S. D. Jacobs, B. Gillman, F. Yang, and J. Ruckman, "Subsurface damage in microgrinding optical glasses" LLE Review 73, 45-49 (1997).

J. Schoen, "A tutorial on deterministic microgrinding" Convergence 7 (1999).

S.D. Jacobs, S.R. Arrasmith, I.A. Kozhinova, L.L. Gregg, A.B. Shorey, H.J. Romanofsky, D. Golini et al., "MRF: Computer-Controlled Optics Manufacturing" Am. Ceram. Soc. Bulletin 78, 42-48 (1999).

S.D. Jacobs, W. Kordonski, I.V. Prokhorov, D. Golini, G.R. Gorodkin, and T.D. Strafford, "Deterministic magnetorheological finishing" US Patent 5795212 (1998).

H. Pollicove, and D. Golini, "Deterministic manufacturing processes for precision optical surfaces" Key Eng. Mat. 238-239, 53-58 (2003).

Y. Verma, A.K. Chang, J.W. Berrett, K. Futtere, G.J. Gardopee, J. Kelley, T. Kyler et al., "Rapid damage-free shaping of silicon carbide using Reactive Atom Plasma (RAP) processing" Proc. SPIE 6273, 62730B (2006).

Y. Mori, K. Yamauchi, K. Endo, T. Ide, H. Toyota, K. Nishizawa, and M. Hasegawa, "Evaluation of elastic emission machined surfaces by scanning tunneling microscopy" J. Vac. Sci. Technol. A 8, 621-624 (1990).

Y. Mori, K. Yamauchi, and K. Endo, "Elastic emission machining" Precision Eng. 9, 123-128 (1987).

Y. Mori, K. Yamauchi, and K. Endo, "Mechanism of atomic removal in elastic emission machining" Precision Eng. 10, 24-28 (1988).

P.E. Miller, T.I. Suratwala, L.L. Wong, M.D. Feit, J.A. Menapace, P.J. Davis, and R.A. Steele, "The distribution of subsurface damage in fused silica" Proc. SPIE 5991, 599101 (2005).

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis et al., "Sub-surface mechanical damage distributions during grinding of fused silica" J. Non-Crystal. Solids 352, 5601-5617 (2006).

J.A. Menapace, P.J. Davis, W.A. Steele, L.L. Wong, T.I. Suratwala, and P.E. Miller, "MRF applications: Measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique" Proc. SPIE 5991, 599103 (2005).

Z. Wang, Y. Wu, Y. Dai, and S. Li, "Subsurface damage distribution in the lapping process" Appl. Opt. 47, 1417-1426 (2008).

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D.D. Walker, "Subsurface damage in precision ground ULE® and Zerodur® surfaces" Opt. Express 15, 12197-12205 (2007).

T. Suratwala, R. Steele, M.D. Feit, L. Wong, P. Miller, J. Menapace, and P. Davis, "Effect of rouge particles on the sub-surface damage of fused silica during grinding during grinding/polishing' J. Non-Crystal. Solids 354, 2023-2037 (2008).

W. Zhang, and J. Zhu, "Controlling subsurface damage in neodymium-doped phosphate glass" Optik 120, 752-757 (2009).

J. Shen, S. Liu, K. Yi, H. He, J. Shao, and Z. Fan, "Subsurface damage in optical substrates" Optik 116, 288-294 (2005).

D.A. Lucca, E. Brinksmeierm and G. Goch, "Progress in assessing surface and subsurface integrity" Ann. CIRP 47, 669-693 (1998).

R.E. Green Jr., "Nondestructive Evaluation of Materials" Annu. Rev. Mater. Sci. 20, 197-217 (1990).

E. Brinksmeier, "State-of-the-art of non-destructive measurement of sub-surface material properties and damages" Prec. Eng. 11, 211-224 (1989).

C.J. Hellier, "Handbook of nondestructive evaluation" The McGraw-Hill Companies Inc., New York, (2003).

B.R. Lawn and D.B. Marshall, "Hardness, toughness, and brittleness: An indentation Analysis" J. Amer. Ceram. Soc. 62, 347-350 (1979).

M. Buijs and K. K. Hounten, "A model for lapping of glass" J. Mater. Sci. 28, 3014-3020 (1993).

Y. Ahn, N. Cho, S. Lee and D. Lee, "Lateral crack in abrasive wear of brittle materials" JSME Int. J. Series A 46, 140-144 (2003).

Y. P. Chang, M. Hashimura, and D. A. Dornfeld, "An investigation of material removal mechanisms in lapping with grain size transition" J. Manuf. Sci. Eng. 122, 413-419 (2000).

J.C. Lambropoulos, S.D. Jacobs, and J. Ruckman, "Material removal mechanisms from grinding to polishing" Ceram. Trans. 102, 113-128 (1999).

C.J. Evans, E. Paul, D. Dornfeld, D.A. Lucca, G. Byrne, M. Tricard, F. Klocke et al., "Material Removal Mechanisms in Lapping and Polishing" Ann. CIRP 152, 611-633 (2003).

M. J. Cumbo, "Chemo-mechanical Interactions in Optical Polishing," Ph.D. Dissertation, University of Rochester, Rochester, NY, 1993.

T. Izumitani, and S. Harada, "Polishing mechanism of optical glasses" Glass Technol. 12, 131-135 (1971).

L.M. Cook, "Chemical process in glass polishing" J. Non-Crystal. Solids 120, 152-171 (1990).

Y. Li, J. Hou, Q. Xu, J. Wang, W. Yang and Y. Guo, "The characteristics of optics polished with a polyurethane pad" Opt. Express 16, 10285-10293 (2008).

R.R. Berggren and R.A. Schmell, "Pad polishing for rapid production of large flats," Proc. SPIE 3134, 252-257 (1997); John C. Lambropolous personal communication (New York, 2008).

D.W. Camp, M. Kozlowskim, L. Sheehan, M. Nichols, M. Dovik, R. Raether, and I. Thomas, "Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces" Proc. SPIE 3244, 356-364 (1998).

J.W. Carr, E. Fearon, L.J. Summers, I.D. Hutcheon, J.K. Haack, and S. Hoskins, "Subsurface structure in polished fused silica and diamond turned single crystal silicon" UCRL-JC-134512 (1999).

L. Rayleigh, "Polish" Nature 64, 385-388 (1901)

F.W. Preston, "The structure of abraded glass surfaces" Tran. Opt. Soc. 23, 141-164 (1922).

J. Mackerle, "Finite-element modeling of non-destructive material evaluation, an addendum: a bibliography (1997-2003)" Modelling Simul. Mater. Sci. Eng. 12, 799-834 (2004).

T. O. Mulhearn, "The deformation of metals by Vickers-type pyramidal indenters" J. Mech. Phys. Solids 7, 85-96 (1959).

S. Van der Zwaag, J.T. Hagan, and J.E. Field, "Studies of contact damage in polycrystalline zinc sulphide" J. Mater. Sci. 15, 2965-2972 (1980).

D.S. Anderson and M.E. Frogner, "A method for the evaluation of subsurface damage" in Technical Digest of the Optical Fabrication and Testing Workshop (Optical Society of America, Washington DC, 1985).

F. Guiberteau, N.P. Padture and B.R. Lawn, "Effect of grain size on Hertzian contact damage in alumina" J. Am. Ceram. Soc. 77, 1825-1831 (1994).

H.H.K. Xu and S. Jahanmir, "Simple technique for observing subsurface damage in machining of ceramics" J. Am. Ceramic Soc. 77, 1388-1390 (1994).

H. Helbawi, L. Zhang, and I. Zarudi, "Difference in subsurface damage in indented specimens with and without bonding layer" Int. J. Mech. Sci. 43, 1107-1121 (2001).

Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, "Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses" J. Am. Ceram. Soc. 77, 3277-3280 (1994).

J.A. Randi, J.C. Lambropoulos, and S.D. Jacobs, "Subsurface damage in some single crystalline optical materials" Appl. Opt. 44, 2241-2249 (2005).

S. Li, Z. Wang, and Y. Wu, "Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes" J. Mater. Process. Technol. 205, 34-41 (2008).

S. Li, Z. Wang, and Y. Wu, "Relationship between subsurface damage and surface roughness of ground optical materials," J. Cent. South Univ. Technol. 14, 546-551 (2007).

T. Ohta, J. Yan, T. Kuriyagawa, S. Kodera, and T. Nakasuji, "Prediction of subsurface damage depth of ground brittle materials by surface profiling" Int. J. Machining and Machinability of Mater. 2, 108-124 (2007).

F. S. Jones, "Latent milling marks on glass," J. Amer. Ceram. Soc. 29, 108-114 (1946).

P. W. Kendall, "Etching polished depressions in glass plates" J. Sci. Instrum. 41, 485 (1964).

M. Yoshikawa, B. Zhang, and H. Tokura, "Observations of ceramics surface cracks by newly proposed methods" J. Ceram. Soc. Jpn. 95, 961-969 (1987) in Japanese.

C. Miao, S.N. Shafrir, J.C. Lambropoulos, J. Mici, and S.D. Jacobs, "Shear stress in magnetorheological finishing for glasses" Appl. Opt. 48, 2585-2594 (2009).

A.B. Shorey, S.D. Jacobs, W.I. Kordonski, and R.F. Gans, "Experiments and observations regarding the mechanisms of glass removal in magnetorheological finishing" Appl. Opt. 40, 20-33 (2001).

B. Shorey, Mechanisms of material removal in magneto-rheological finishing (MRF) of glass (Ph.D. Dissertation, University of Rochester, Rochester, NY, 2000).

Miao, J.C. Lambropoulos, and S.D. Jacobs, "Process parameter effects on material removal in magnetorheological finishing of borosilicate glass" Appl. Opt. 49, 1951-1963 (2010).

W.E. Kline and H.S. Fogler, "Dissolution kinetics: catalysis by strong acids" J. Colloid Interface Sci. 82, 93-102 (1981).

Q. Zhao, J. Chen, J. Yao, and S. Zhou, "Investigation of surface and subsurface damage in diamond grinding of optical glass using hybrid copper-resin-bonded diamond wheel" J. Vac. Sci. Technol. B 27, 1489-1495 (2009).

Y. Li, H. Huang, R. Xie, H. Li, Y. Deng, X. Chen, J. Wang et al., "A method for evaluating subsurface damage in optical glass," Opt. Express 18, 17180-17186 (2010).

L. Wong, T. Suratwala, M.D. Feit, P.E. Miller, and R. Steele, 'The effect of HF/NH4F etching on the morphology of surface fractures on fused silica' J. Non-Crystal. Solids 355, 797-810 (2009).

M. Affatigato, D.H. Osborne, and R.F. Haglund Jr., "Effect of Surface Roughness on the Acid Etching of Amorphous Silica" J. Am. Ceram. Soc. 79, 688-694 (1996).

J.W. Carr, E. Fearon, L.J. Summers, and I.D. Hutcheon, "Subsurface damage assessment with atomic force microscopy" UCRL-JC-132385 (1999).

T. R. Thomas, Rough surfaces (Second Ed., Imperial College Press, London, 1999).

C.Y. Poon, and B. Bhushan, "Comparison of surface roughness measurements by stylus profiler, AFM, and non-contact optical profiler" Wear 190, 76-88 (1995).

V. Radhakrishnan, "Effect of stylus radius on the roughness values measured with tracing stylus instruments" Wear 16, 325-335 (1970).

G.A.C.M. Spierings, "Wet chemical etching of silicate glasses in hydrofluoric acid based solutions" J. Mater. Sci. 28, 6261-6273 (1993).

T. Liew, S.W. Wu, S.K. Chow, and C.T. Lim, "Surface and subsurface damages and magnetic recording pattern degradation induced by indentation and scratching" Tribol. Int. 33, 611-621 (2000).

B.J. Inkson, M. Mulvihill, and G. Mobus, "3D determination of grain shape in a FeAl-based nanocomposite by 3D FIB tomography" Scripta Mater. 45, 753-758 (2001).

B.J. Inkson, D. Leclere, F. El Fallagh, and B. Derby, "The effect of focused ion beam machining on residual stress and crack morphologies in Alumina" Phys. Conf. Ser. 26, 219-222 (2006).

B.J. Inkson, H.Z. Wu, T.J. Steer, and G. Möbus, "3D mapping of subsurface cracks in alumina using FIB: Fundamentals of nanoindentation and nanotribology" Mater. Res. Soc. Proc. 649, Q7.7.1-Q7.7.6 (2001).

H.Z. Wu, S.G. Roberts, G. Möbus, and B.J. Inkson, "Subsurface damage analysis by TEM and 3D FIB crack mapping in alumina" 5 vol.%SiC nanocomposites' Acta Mater. 51, 149-163 (2003).

B.J. Inkson, T. Steer, G. Möbus, and T. Wagner, "Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by focused ion beam microscopy" J. Microscopy 201, 256-269 (2001).

T.J. Steer, G. Möbus, T. Wagner, O. Kraft, and B.J. Inkson, "3D FIB mapping of nanoindentation zones in a Cu-Ti multilayered coating" Thin Solid Films 413, 147-154 (2002).

S. Bhattacharya, A.R. Riahi, and A.T. Alpas, "Indentation-induced subsurface damage in silicon particles of Al-Si alloys" Mater. Sci. Eng. A 527, 387-396 (2009).

E.A. Stach, V.R. Radmilovic, D. Deshpande, A. Malshe, D. Alexander, and D. Doerr, "FIBTEM characterization of surface and sub-surface defects introduced into lithium niobate by a femtosecond laser" Microsc. Microanal. 9, 876-877 (2003).

T.J. Steer, G. Mobus, O. Kraft, T. Wagner, and B.J. Inkson, "3D FIB and AFM mapping of nanoindentation zones" Mat. Res. Soc. Symp. Proc. 649, Q3.7.1-Q3.7.6 (2001).

M. Sugiyama and G. Sigesato, "A review of focused ion beam technology and its applications in transmission electron microscopy" J. Electron. Microsc. 53, 527-536 (2004).

F. Elfallagh and B.J. Inkson, "3D analysis of crack morphologies in silicate glass using FIB tomography" J. Euro. Ceram. Soc. 29, 47-52 (2009).

J.R. Kremer, D.N. Mastronarde, and J.R. McIntosh, "Computer visualization of threedimensional image data using IMOD" J. Struct. Biol. 116, 71-76 (1996).

J.A. Menapace, P.J. Davis, W.A. Steele, L.L. Wong, T.I. Suratwala, and P.E. Miller, "Utilization of magnetorheological finishing as a diagnostic tool for investigating the three-dimensional structure of fractures in fused silica" Proc. SPIE 5991, 599102 (2005).

K. Saruki and A. Yamada, "Observation of grinding damage and bending strength of ceramics" J. Soc. Mat. Sci. Jpn. 44, 927-932 (1995) in Japanese.

W. Kanematsu, "Visualization of subsurface damage in silicon nitride from grinding by a plasma etching and dye impregnation method" J. Am. Ceram. Soc. 89, 2564-2570 (2006).

W. Kanematsu, M. Sando, L.K. Ives, R. Marinenko, and G.D. Quinn, "Dye impregnation method for revealing machining crack geometry" J. Am. Ceram. Soc. 84, 795-800 (2001).

N. Lapinski, and A. Sather, "Process for the Detection of Micro-Cracks" US Patent 4172224 (1979).

T. Homma, C.E.D. Chidsey, and M. Watanabe, "Method of detecting microscopic defects existing on a silicon wafer" US Patent 6174727 (2001).

S.R. Choi and J.A. Salem, "Preloading technique in dynamic fatigue testing of glass and ceramics with an indentation flaw system" J. Am. Ceram. Soc. 79, 1228-1232 (1996).

N.N. Kachalov, Technology of grinding and polishing sheet glass (Acad. Sci., Moscow-Leningrad, 1958) in Russian.

N.J. Brown, B.A. Fuchs, P.P. Hed and I.F. Stowers, "The response of isotropic brittle materialsto abrasive processes" in Proceedings of 43rd Annual Symposium on Frequency Control, 611-616 (IEEE, Denver, C0lorado, 1989).

J.C. Lambropoulos, Y. Li, P. Funkenbusch, and J. Ruckman, "Non-contact estimate of grindinginduced subsurface damage" Proc. SPIE 3728, 41-50 (1999).

P.P. Hed and D.F. Edwards, "Relationship between subsurface damage depth and surface roughness during grinding of optical glass with diamond tools" Appl. Opt. 26, 2491 (1987).

J.C. Lambropoulos, S.D. Jacobs, and J. Ruckman, "Micromechanics of material removal mechanisms from brittle surfaces: Subsurface damage and surface microroughness" LLE Review 74, 131-138 (1998).

W. Zhang and J. Zhu, "Determination of Subsurface damage in Nd-doped phosphate glasses" Proc. SPIE 6723, 672311 (2007).

J. Neauport, J. Destribats, C. Manier, C. ambard, P. Cormont, B. Pintault, and O. Rondeau, "Loose abrasive slurries for optical glass lapping" Appl. Opt. 49, 5736-5745 (2010).

E.S. Gadelmawla, M.M. Koura, T.M.A. Maksoud, I.M. Elewa, and H.H. Soliman, "Roughness parameters" J. Mater. Process. Technol. 123, 133-145 (2002).

S.D. Jacobs, "Manipulating mechanics and chemistry in precision optics finishing" Sci. Technol. Adv. Mater. 8, 153-157 (2007).

K.R. Fine, R. Garbe, T. Gip, and Q. Nguyen, "Non-destructive, real-time direct measurement of subsurface damage" Proc. SPIE 5799, 105-110 (2005).

R. Sabia, H.J. Stevens, and J.R. Varner, "Pitting of a glass-ceramic during polishing with cerium oxide" J. Non-Crystal. Solids 249, 123-130 (1999).

B. Ma, Z. Shen, P. He, Y. Ji, T. Sang, H. Liu, D. Liu, and Z. Wang, "Detection of subsurface defects of fused silica optics by confocal scattering microscopy" Chin. Opt. Lett. 8, 296-299 (2010).

J.C. Lambropoulos, "From abrasive size to subsurface damage in grinding" Convergence 8, 1-3 (2000).

Y. Li, N. Zheng, H. Li, J. Hou, X. Lei, X. Chen, Z. Yuan et al. "Morphology and distribution of subsurface damage in optical fused silica parts: Bound-abrasive grinding" Appl. Surf. Sci. 257, 2066-2073 (2011).

J. Wang, Q. Xu, L. Yang, X. Chen, and Y. Li, "Characterizing subsurface damage in fused silica glass: Loose abrasive grinding" J. Opt. Soc. Korea (in press).

T. Suratwala, P. Miller, M. Feit, and J. Menapace, "Scratch forensics" Opt. & Photo. News 20(9), 12-15 (2008).

Z.L. Wu, M.D. Feit, M.R. Kozlowski, A.M. Rubenchik, and L. Sheehan, "Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings" Proc. SPIE 3578, 721-729 (1999).

Z.L. Wu, L. Sheehan, and M.R. Kozlowski, "Laser modulated scattering as a non-destructive evaluation tool for defect inspection in optical materials for high power laser applications" Opt. Express 3, 376-383 (1998).

W.A. Ellingson, D.M. Ayaz, M.P. Brada, and W. O'Connell, "Detection of subsurface defects in machined silicon nitride ceramics by optical scattering methods" Natl. Inst. Stand. Technol. Spec. Publ. 847, 147-157 (1993).

W.A. Ellingson and M.P. Brada, "Optical method and apparatus for detection of surface and near-subsurface defects in dense ceramics" US Patent 5426506 (1995).

J.S. Steckenrider, Automated laser scatter detection of surface and subsurface defects in Si3N4 components (ANL/ET/CP-85328, 1995).

J.A. Todd, and J. Sun, "Optical method and apparatus for detection of defects and microstructural changes in ceramics and ceramic coatings" US Patent 6285449 (2001).

W. Lu, Z.J. Pei, and J.G. Sun, "Non-destructive evaluation methods for subsurface damage in silicon wafers: a literature review" Int. J. Machining and Machinability of Materials 2, 125-142 (2007).

W.K. Lu, J.G. Sun, and Z.J. Pei, "Subsurface damage measurement in silicon wafers with cross-polarisation confocal microscopy" Int. J. Nanomanufacturing 1, 272-282 (2006).

J. Sun, "Device and nondestructive method to determine subsurface micro-structure in dense materials" US Patent 7042556 (2006).

B. Tata and B. Raj, "Confocal laser scanning microscopy: Applications in material science and technology" Bull. Mater. Sci. 21, 263-278 (1998).

B.R. Whittle and R.J. Hand, "Morphology of Vickers indent flaws in soda-lime-silica glass" J. Am. Ceram. Soc. 84, 2361-2365 (2001).

F.H. Koklu, A.N. Vamivaksa, J.I. Quesnel, S.B. Ippolito, B.B. Goldberg, and M.S. Unlu, "Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens" in Proceedings of the 20th Annual Meeting of the IEEE, 535-536 (IEEE Laser and Electro-Optics Society, Lake Buena Vista, Florida, 2007).

S.B. Ippolito, B.B. Goldberg, and M.S. Unlu, "High spatial resolution subsurface microscopy" Appl. Phys. Lett. 78, 4071-4073 (2001).

F.H. Koklu, S.B. Ippolito, B.B. Goldberg, and M.S. Unlu, "Subsurface microscopy of integrated circuits with angular spectrum and polarization control" Opt. Lett. 34, 1261-1263 (2009).

E. Ramsay, K.A. Serrelsm M.J. Thomson, A.J. Waddie, M.R. Taghizadeh, R.J. Warburton, and D.T. Reid, "Three-dimensional nanoscale subsurface optical imaging of silicon circuits" Appl. Phys. Lett. 90, 131101 (2007).

S.B. Ippolito, S.A. Thorne, M.G. Eraslan, B.B. Goldberg, M.S. Unlu, and Y. Leblebici, "High spatial resolution subsurface thermal emission microscopy" Appl. Phys. Lett. 84, 4529-4531 (2004).

F.H. Koklu, Y. Meydbray, E.R. Behfinger, J.I. Quesnel, D. Karabacak, S.B. Ippolito, B.B. Goldberg, and M.S. Unlu, "Subsurface imaging with widefield and confocal numerical aperture increasing lens microscopes" in Proceedings of the 19th Annual Meeting of the IEEE, 695-696 (IEEE Laser and Electro-Optics Society, Singapore, 2006.

S.B. Ippolito, B.B. Goldberg, and M.S. Unlu, "Theoretical analysis of numerical aperture increasing lens microscopy" J. Appl. Phys. 97, 053105 (2005).

F.H. Koklu, J.I. Quesnel, A.N. Vamivakas, S.B. Ippolito, B.B. Goldberg, and M.S. Unlu, "Widefield subsurface microscopy of integrated circuits" Opt. Express 16, 9501-9506 (2008).

E. Ramsay, K.A. Serrels, M.J. Thomson, A.J. Waddie, R.J. Warburton, M.R. Taghizadeh, and D.T. Reid, "Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method" Microelectron. Reliab. 47, 1534-1538 (2007).

J. Winn, A.R. Boccaccini, N. Imam, and P.A. Trusty, "Examination of microhardness indentation-induced subsurface damage in alumina platelet reinforced borosilicate glass using confocal scanning laser microscopy" J. Microscopy 186, 35-40 (1997).

J. Winn and J. A. Yeomans, "A study of microhardness indentation fracture in alumina using confocal scanning laser microscopy" Philos. Mag. A 74, 1253-1263 (1996).

J. Neauport, P. Cormont, P. Legros, C. Amdard, and J. Destribats, "Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy" Opt. Express 17, 3543-3554 (2009).

M. Derndarsky and G. Ocklind, "Some preliminary observations on subsurface damage on experimental and archaeological quartz tools using CLSM and dye" J. Archaeol. Sci. 28, 1149-1158 (2001).

K.R. Fine, R. Garbe, T. Gip, and Q. Nguyen, "Non-destructive, real-time direct measurement of subsurface damage" Proc. SPIE 5799, 105-110 (2005).

T. S. Gip, R. Garbe, and Q. Nguyen, "Nondestructive evaluation of subsurface damage in optical elements" US Patent 7330250 (2008).

Z. Shen, B. Ma, Z. Wang, Y. Ji, T. Liu, and H. Liu, "Fabrication of supersmooth surfaces with low subsurface damage" Proc. SPIE 6722, 67223W (2007).

B. Bertussi, P. Cormont, S. Palmier, P. Legros, and J. Rullier, "Initiation of laser-induced damage sites in fused silica optical components" Opt. Express 17, 11469-11479 (2009).

P.A. Temple, "Total internal reflection microscopy: a surface inspection technique" Appl. Opt. 20, 2656-2664 (1981).

P.A. Temple, "Examination of laser damage sites of transparent surfaces and films using total internal reflection microscopy" Natl. Bur. Std. Spec. Publ. 568, 333-341 (1980).

S.N. Jabr, "Total internal reflection microscopy: inspection of surfaces of high bulk scatter materials" Appl. Opt. 24, 1689-1692 (1985).

F. Draheim, B. Harnisch, and T. Weigel, "Sub surface damage of optical components and the influence on scattering properties" Proc. SPIE 2210, 709-720 (1994).

C. F. Kranenberg and K. C. Jungling, "Subsurface damage identification in optically transparent materials using a nondestructive method" Appl. Opt. 33, 4248-4253 (1994).

Z.M. Liao, S.J. Cohen, and J.R. Taylor, "Total internal reflection microscopy (TIRM) as a nondestructive subsurface damage assessment tool" Proc. SPIE 2428, 43-53 (1995).

L.M. Sheehan, M. Kozlowski, and D.W. Camp, "Application of total internal reflection microscopy for laser damage studies on fused silica" Proc. SPIE 3244, 282-295 (1998).

M. Yan, L. Wang, W. Sikhaus, M. Kozlowski, J. Yang, and U. Mohideen, "Defect study in fused silica using near field scanning optical microscopy" Proc. SPIE 3244, 268-271 (1998).

R. van der Bijl, O.W. Fahnle, and H. van Brug, "Subsurface damage measurements as a tool for process monitoring" in Proceedings of the ASPE Annual Meeting, 606-609 (American Society for Precision Engineering, Raleigh, NC, 1999).

R.M. van der Bijl, O.W. Fahnle, H. van Brug, and J.J.M. Braat, "In-process monitoring of grinding and polishing of optical surfaces" Appl. Opt. 39, 3300-3303 (2000).

M. Meeder, T. Mauret, S. Booij, J. Braat, and O. Fahnle, "Optimisation of polishing processes by using iTIRM for in-situ monitoring of surface quality" Proc. SPIE 5180, 40-46 (2003).

O.W. Fahnle, T. Wons, E. Koch, S. Debruyne, M. Meeder, S.M. Booij, and J.J.M. Braat, "iTIRM as a tool for qualifying polishing processes" Appl. Opt. 41, 4036-4038 (2002).

R.M. van der Bijl, O.W. Fahnle, H. van Brug, and J.J.M. Braat, Quantitative roughness measurements with iTIRM (Optical Fabrication and Testing, Québec City, 23 - 27 October 2000).

D. Huang, E.A. Swanson, C.P. Lin, J.S. Schuman, W.G. Stinson, W. Chang, M.R. Hee, T. Flotte, K. Gregory, C.A. Puliafito, J.G. Fujimoto, "Optical coherence tomography" Science 254, 1178-1181 (1991).

E.A. Swanson, D. Huang, M.R. Hee, J.G. Fujitomo, C.P. Lin, and C.A. Puliafito, "Highspeed optical coherence domain reflectometry" Opt. Lett. 17, 151-153 (1992).

J.G. Fujitomo, S. De Silerstri, E.P. Ippen, C.A. Puliafito, R. Margolis, and A. Oseroff, "Femtosecond optical ranging in biological systems" Opt. Lett. 11, 150-152 (1986).

R.C. Youngquist, S. Carr, and D.E.N. Dvies, "Optical coherence-domain reflectometry: a new optical evaluation technique" Opt. Lett. 12, 158-160 (1987).

V.M. Gelikonov, G.V. Gelikonov, R.V. Kuranov, K.I. Pravdenko, A.M. Sergeev, F.I. Feldshtein, Ya. I. Khanin, and D.V. Shabanov, "Coherent optical tomography of microscopic inhomogeneities in biological tissues" JETP Lett. 61, 158-162 (1995).

B.G. Goode, "OCT aims for industrial application" Laser Focus World 45(9), 41-45 (2009).

M. Wojtkowski, "High-speed optical coherence tomography: basics and applications" Appl. Opt. 49, D30-D61 (2010).

J. M. Schmitt, "Optical coherence tTomography (OCT): A review" IEEE J. Sel. Top. Quant. Electron. 5, 1205-1215 (1999).

A.F. Fercher, W. Drexler, C.K. Hitzenberger, and T. Lasser, "Optical coherence tomography- principles and applications" Rep. Prog. Phys. 66, 239-303 (2003).

M. Bashkansky, M.D. Duncan, M. Hahn, D. Lewis III, and J. Reintjes, "Subsurface defect detection in ceramics by high-speed high-resolution optical coherent tomography" Opt. Lett. 22, 61-63 (1997).

M. Bashkansky, P.R. Battle, M.D. Duncan, M. Kahn, and J. Reintjes, "Subsurface defect detection in ceramics using an optical gated scatter reflectometer" J. Am. Ceram. Soc. 79, 1397-1440 (1996).

P.R. Battle, M. Bashkansky, R. Mahon and J. Reintjes, "Subsurface defect detection in ceramic materials using optical gating techniques" Opt. Eng. 35, 1119-1123 (1996).

M.D. Duncan, M. Bashkansky, and J. Reintjes, "Subsurface defect detection in materials using optical coherence tomography" Opt. Express 2, 540-545 (1998).

M. Sergeeva, K. Khrenikov, T. Hellmuth, and R. Boerret, "Sub surface damage measurements based on short coherent interferometry" J. Euro. Opt. Soc. Rap. Pub. 5, 10002 (2010).

T. Hellmuth, R. Borret, and K. Khrennikov, "3-dimensional scanning of grinded optical surfaces based on optical coherence tomography" Proc. SPIE 6671, 66710X (2007).

D. Stifter, P. Burgholzer, O. Hoglinger, E. Gotzinger, and C.K. Hitzenberger, "Polarisationsenstitive optical coherence tomography for material characterisation and strain-field mapping" Appl. Phys. A 76, 947-951 (2003).

S.G. Demos, M. Staggs, K. Minoshima, and J. Fujitomo, "Characterization of laser induced damage sites in optical components" Opt. Express 10, 1444-1450 (2002).

G.M. Guss, I.L. Bass, R.P. Hackel, C. Maihiot, and S.G. Demos, "In situ monitoring of surface postprocessing in large-aperture fused silica optics with optical coherence tomography" Appl. Opt. 47, 4569-4573 (2008).

D. Stifter, "Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography" Appl. Phys. B 88, 337-357 (2007).

J. Steinert, S. Gliech, A. Wutting, and A. Duparre, "Advanced methods for surface and subsurface defect characterization of optical components" Proc. SPIE 4099, 290-298 (2000).

A. Wuttig, J. Steinert, A. Duparre, and H. Truckenbrodt, "Surface roughness and subsurface damage characterization of fused silica substrates" Proc. SPIE 3739, 369-376 (1999).

W.B. Williams, B.A. Mullany, W.C. Parker, P.J. Moyer, and M.H. Randles, "Using quantum dots to tag subsurface damage in lapped and polished glass samples" Appl. Opt. 48, 5155-5163 (2009).

W. Williams, B. Mullany, W. Parker, and P. Moyer, "Evaluating subsurface damage with quantum dots" in Optical Fabrication and Testing OSA Technical Digest, paper OWA3 (Optical Society of America, Jackson Hole, Wyoming, 2010).

W. Williams, B.A. Mullany, W.C. Parker, P. Moyer, and M.H. Randles, "Using quantum dots to evaluate subsurface damage depths and formation mechanisms in glass" CIRP Annals- Manuf. Technol. 59, 569-572 (2010).

J. Neauport, L. Lamaignere, H. Bercegol, F. Pilon, and J.C. Birolleau, "Polishing-induced contamination of fused silica optics and laser induced damage density at 351 nm" Opt. Express 13, 10163-10171 (2005).

T. Yonushonis, "Manufacturing fluid including fluorescent dye penetrant and method for using to make components" US Patent 6677584 (2004) and references therein.

R.S. Polvani and C.J. Evans, "Microindentation as a technique for assessing subsurface damage in optics" Natl. Inst. Stand. Technol. Spec. Publ. 801, 25-38 (1990).

T. Yamada, N. Morita, and Y. Yoshida, "Newly developed micro-indentation and scratch tester for measuring sub-surface damaged layer" Journal of the Japan Society of Precision Engineering 65, 131-135 (1999) in Japanese.

D. Paehler, D. Schneider, and M. Herben, "Nondestructive characterization of sub-surface damage in rotational ground silicon wafers by laser acoustics" Microelectronic Engineering 84, 340-354 (2007).

F. Yang, "Effect of subsurface damage on indentation behavior of ground ULETM glass" J. Non-Crystal. Solids 351, 3861-3865 (2005).

P. Cormont, J. Neauport, N. Darbois, J. Destribats, C. Amdard, and O. Rondeau, "Diagnostics tools for subsurface damage characterization of ground silica parts" Proc. SPIE 7504, 75040Y (2009).

P.K. Subrahmanyan, K. Pang, T.H. Yu, and R. Salij, "Simultaneous figuring and damage mitigation of optical surfaces" Proc. SPIE 7132, 71321R (2008).

Y. Mori, K. Yamamura, K. Endo, K. Yamauchi, K. Yasutake, H. Goto, H. Kakiuchi, Y. Sano, H. Mimura, "Creation of perfect surfaces" J. Cyst. Growth 275, 39-50 (2005).