Nanostructured surface fabricated by laser interference lithography to attenuate the reflectivity of microlens arrays

P.-Y. Baroni; B. Päivänranta; T. Scharf; W. Nakagawa; M. Roussey; M. Kuittinen; H. P. Herzig

doi:10.2971/jeos.2010.10006

Journal of the European Optical Society - Rapid publications, Vol 5 (2010)

Nanostructured surface fabricated by laser interference lithography to attenuate the reflectivity of microlens arrays

P.-Y. Baroni, B. Päivänranta, T. Scharf, W. Nakagawa, M. Roussey, M. Kuittinen, H. P. Herzig

Abstract

A subwavelength-scale square lattice optical meta-material is fabricated using an interference photolithography process on the surface of a quartz microlens array. This nanostructuring of the quartz surface introduces an antireflective effect, reducing reflectivity between 10% and 30% and enhancing the transmissivity 3% in the visible spectrum. This approach permits fast fabrication on a 4-inch wafer covered with microlenses (non-flat surface) and produces monolithic devices which are robust to adverse environments such as temperature variations.

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