Deterministic measurement and correction of the pad shape in full-aperture polishing processes

D. Liao; Q. Zhang; R. Xie; X. Chen; S. Zhao; J. Wang

doi:10.2971/jeos.2015.15049

Journal of the European Optical Society - Rapid publications, Vol 10 (2015)

Deterministic measurement and correction of the pad shape in full-aperture polishing processes

D. Liao, Q. Zhang, R. Xie, X. Chen, S. Zhao, J. Wang

Abstract

Full-aperture polishing is a significant process in fabricating large optical flats because it restrains Mid-Spatial Frequency errors and removes material quickly on the whole optic surface. Nevertheless, optical flats fabricated by full-aperture polishing generally fail to meet the stringent requirement of surface figure, which has to be corrected by sub-aperture polishing processes. Surface figure of optical flats in full-aperture polishing processes is primarily dependent on the pressure distribution uniformity which correlates intensively with the lap shape. At present, practical and precise means are urgently desired for measuring and correcting the lap shape, especially the polyurethane pad lap. In the study, we present a novel method for deterministic measurement of the pad shape. The method obtains the height of the pad at spirally distributed locations implemented by the revolution of the pad and translation of the laser displacement sensor. The pad shape in terms of matrixes whose elements representing the heights at the corresponding locations is then calculated by interpolation algorithm based on the obtained data. Further, we propose a method for deterministic correction of the pad shape utilizing a small conditioning tool. The dwell time algorithm and implementation strategy for the dwell time are provided for common full-aperture polishers. These solutions for the deterministic measurement and correction of the pad shape have been validated on a full-aperture polisher with polyurethane pad. The polishing experiments revealed that the optic surface figure was obviously improved.

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