Fabrication of single-mode channel polymer waveguides using vacuum assisted microfluidic soft lithography

S. Baig; G. Jiang; Q. Sun; M. R. Wang

doi:10.2971/jeos.2013.13076

Journal of the European Optical Society - Rapid publications, Vol 8 (2013)

Fabrication of single-mode channel polymer waveguides using vacuum assisted microfluidic soft lithography

S. Baig, G. Jiang, Q. Sun, M. R. Wang

Abstract

We report on the fabrication of single-mode channel waveguide structures produced by the vacuum assisted microfluidic soft lithography technique. The soft lithographic technique in conjunction with a specially designed photomask pattern and a synthesized UV curable epoxy resin can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of the microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. Notably, the introduction of sectional flow tapers allows for proper uniform filling of long length small cross-sectional waveguide structures that would ordinarily succumb to clogging at shorter distances during channel filling. The fabricated polymer waveguide was 30 mm in length with a cross section dimension of 7x7 μm. The single-mode waveguide propagation was confirmed with beam profiler measurement, and the measured propagation loss for this polymer waveguide was about 0.55 dB/cm.

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