Journal of the European Optical Society - Rapid publications, Vol 8 (2013)

Fabrication of single-mode channel polymer waveguides using vacuum assisted microfluidic soft lithography

S. Baig, G. Jiang, Q. Sun, M. R. Wang


We report on the fabrication of single-mode channel waveguide structures produced by the vacuum assisted microfluidic soft lithography technique. The soft lithographic technique in conjunction with a specially designed photomask pattern and a synthesized UV curable epoxy resin can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of the microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. Notably, the introduction of sectional flow tapers allows for proper uniform filling of long length small cross-sectional waveguide structures that would ordinarily succumb to clogging at shorter distances during channel filling. The fabricated polymer waveguide was 30 mm in length with a cross section dimension of 7x7 μm. The single-mode waveguide propagation was confirmed with beam profiler measurement, and the measured propagation loss for this polymer waveguide was about 0.55 dB/cm.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2013.13076]

Full Text: PDF

Citation Details

Cite this article


D. Losic, J. G. Mitchell, R. Lal, and N. H. Voelcker, ”Rapid Fabrication of Micro- and Nanoscale Patterns by Replica Molding from Diatom Biosilica,” Adv. Funct. Mater. 17, 2439–2446 (2007).

P. Kim, K. W. Kwon, M. C. Park, S. H. Lee, S. M. Kim, and K. Y. Suh, ”Soft Lithography for Microfluidics: a Review,” Biochip J. 2, 1–11 (2008).

J. Teng, H. Yan, L. Li, M. Zhao, H. Zhang, and G. Morthier, ”Simple ultraviolet-based soft-lithography process for fabrication of lowloss polymerpolysilozanes-based waveguides,” IET Optoelectron. 5, 265–269 (2011).

T. Ishigure, and Y. Nitta, ”Polymer optical waveguide with multiple graded-index cores for on-board interconnects fabricated using soft-lithography,” Opt. Express 18, 14192–14201 (2010).

A. Flores, S. Song, S. Baig, and M.R. Wang, ”Vacuum Assisted Microfluidic Technique for Fabrication of Guided Wave Devices,” IEEE Photonic. Tech. L. 20, 1246–1248 (2008).

A. Fujii, T. Shimizu, K. Shimizu, K. Yatsuda, M. Igusa, S. Ohtsu, and E. Akutsu, ”A novel fabrication technology of polymer optical waveguide and its application,” Proc. SPIE 6775, 677501–677506 (2007).

J. Scheuer, and A. Yariv, ”Fabrication and characterization of lowloss polymeric waveguides and micro-resonators,” J. Europ. Opt. Soc. Rap. Public. 1, 06007 (2006).

A. Flores, and M. R. Wang, Lithography (Sciyo Books, Rijeka, 2010).

G. Jiang, S. Baig, and M. R. Wang, ”Flexible Polymer Waveguides with Integrated Mirrors Fabricated by Soft Lithography for Optical Interconnection,” J. Lightwave Technol. 31, 1835–1841 (2013).

B. E. A. Saleh, and M. C. Teich, Fundamentals of Photonics (Second edition, John Wiley & Sons, Hoboken, 2007).