Journal of the European Optical Society - Rapid publications, Vol 8 (2013)

Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

N. Kumar, O. El Gawhary, S. Roy, S. E. Pereira, H. P. Urbach


Non-interferometric phase retrieval from the intensity measurements in Coherent Fourier Scatterometry (CFS) is presented using a scanningfocused spot. Formulae to determine the state of polarization of the scattered light and to retrieve the phase difference between overlappingscattered orders are given. The scattered far field is rigorously computed and the functionality of the method is proved with experimentalresults.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2013.13048]

Full Text: PDF

Citation Details

Cite this article


H. Gross, R. Model, M. Bar, M. Wurm, B. Bodermann, and A. Rathsfeld, ”Mathematical modelling of indirect measurements in scatterometry,” Measurement 39, 782–794 (2006).

H. Gross, J. Richter, A. Rathfeld, and M. Bar, ”Investigations on a robust profile model for the reconstruction of 2D periodic absorber lines in scatterometry,” J. Europ. Opt. Soc. Rap. Public. 5, 10053 (2010).

M. Wurm, F. Pilarski, and B. Bodermann, ”A new flexible scatterometer for critical dimension metrology,” Rev. Sci. Instrum. 81, 023701 (2010).

R. M. Silver, B. M. Barnes, A. Heckert, R. Attota, R. Dixson, and J. Jun, ”Angle resolved optical metrology,” Proc. SPIE 6922, 69221M (2008).

M. Wurm, S. Bonifer, B. Bodermann, and M. Gerhard, ”Comparison of far field characterisation of DOEs with a goniometric DUVscatterometer and a CCD-based system,” J. Europ. Opt. Soc. Rap. Public. 6, 11015s (2011).

O. El Gawhary, N. Kumar, S. F. Pereira, W. M. J. Coene, and H. P. Urbach, ”Performance analysis of coherent optical scatterometry,” Appl. Phys. B 105, 775–781 (2011).

N. Kumar, O. El Gawhary, S. Roy, V. G. Kutchoukov, S. F. Pereira, W. Coene, and H. P. Urbach, ”Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrology,” Proc. SPIE 8324, 83240Q (2012).

S. Roy, O. El Gawhary, N. Kumar, S. F. Pereira, and H. P. Urbach, ”Scanning effects in coherent fourier scatterometry,” J. Europ. Opt. Soc. Rap. Public. 7, 12031 (2012).

P. Hariharan, Basics of interferometry, second edition (Academic Press, Amsterdam, 2007).

J. R. Fienup, ”Phase retrieval algorithms: A comparison,” Appl. Optics 21, 2758–2769 (1982).

H. M. L. Faulkner and J. M. Rodenburg, ”Movable aperture lensless transmission microscopy: A novel phase retrieval algorithm,” Phys. Rev. Lett. 93, 023903–1 (2004).

J. Miao, D. Sayre, and H. N. Chapman, ”Phase retrieval from the magnitude of the Fourier transforms of nonperiodic objects,” J. Opt. Soc. Am. A 15, 1662–1669 (1998).

M. Born, and E. Wolf, Principles of Optics (Cambridge University Press, 1998).

D. W. Robinson, G. T. Reid, and P. D. Groot, ”Interferogram Analysis: Digital Fringe Pattern Measurement Techniques,” Phys. Today 47, 66 (1994).

R. R. Cordero, J. Molimard, A. Martínez, and F. Labbe, ”Uncertainty analysis of temporal phase-stepping algorithms for interferometry,” Opt. Commun. 275, 144–155 (2007).

V. S. Ignatowsky, ”Diffraction by lens of arbitrary aperture,” Trans. Opt. Inst. Petrograd 1 (4), 1–36 (1919).

B. Richards, and E. Wolf, ”Electromagnetic diffraction in optical systems II. Structure of the image field in an aplanatic system,” Proc. R. Soc. London Ser. A 253, 353–358 (1959).

L. Novotny, and B. Hecht, Principles of Nano-Optics (Cambridge University Press, 2006).