Improving the polishing accuracy by determining the variance of the friction coefficient

A. Kelm; R. Boerret; S. Sinzinger

doi:10.2971/jeos.2012.12049

Journal of the European Optical Society - Rapid publications, Vol 7 (2012)

Improving the polishing accuracy by determining the variance of the friction coefficient

A. Kelm, R. Boerret, S. Sinzinger

Abstract

The variation of the friction coefficient in the polishing process is investigated comparing the results of a numerical simulation with polishing experiments. To improve the accuracy of the predicted wear in the simulation a method is presented to measure the friction coefficient in relation to the relative velocity using an offset tool.

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References

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