Journal of the European Optical Society - Rapid publications, Vol 7 (2012)

Broadband photonic crystal antireflection

M. Malekmohammad, M. Soltanolkotabi, A. Erfanian, R. Asadi, S. Bagheri, M. Zahedinejad, M. Khaje, M. H. Naderi


Broadband antireflection layer have been fabricated by two dimensional (2D) photonic crystals (PCs) with tapered pillars on Si substrate. These PCs have been produced by interference lithography and reactive ion etching (RIE) techniques. The effect of depth and filling factor (FF) of the PCs on the reflectance magnitude and bandwidth has been investigated. The obtained reflectance was less than 1% in the broad spectral range from 400 to 2100 nm. Our numerically simulation shows the PC pillars slope has essential effect in the reduction of the reflection. However, our results show that the existence of RIE grasses in the PCs which are created in the RIE process have not been influenced in the performance of the antireflection layer which leads to simpler fabrication process.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2012.12008]

Full Text: PDF

Citation Details

Cite this article


J. Bae, H. Kim, X. M. Zhang, C. H. Dang, Y. Zhang, Y. Jin Choi, A. Nurmikko, and Z. Lin Wang, "Si nanowire metal-insulatorsemiconductor photodetectors as efficient light harvesters" Nanotechnology 21, 095502 (2010).

J. Chen, Q. Wang, and H. Li, "Microstructured design for light trapping in thin-film silicon solar cells" Opt. Eng. 49, 088001 (2010).

H. C. Lee, S. C. Wu, T. C. Yang, and T. J. Yen, "Efficiently Harvesting Sun Light for Silicon Solar Cells through Advanced Optical Couplers and A Radial pn Junction Structure" Energies 3, 784-802 (2010).

Y. Park, E. Drouard, O. El Daif, X. Letartre, P. Viktorovitch, A. Fave, A. Kaminski, M. Lemiti, and C. Seassal, "Absorption enhancement using photonic crystals for silicon thin film solar cells" Opt. Express 17, 14312-21 (2009).

Y. J. Hung, S. L. Lee, and L. A. Coldren, "Deep and tapered silicon photonic crystals for achieving anti-reflection and enhanced absorption" Opt. Express 18, 6841-52 (2010).

A. Chutinan, N. P. Kherani, and S. Zukotynski, "High-efficiency photonic crystal solar cell architecture" Opt. Express 17, 8871-8 (2009).

Y. M. Song, J. S. Yu, and Y. T. Lee, "Antireflective submicrometer gratings on thin-film silicon solar cells for light-absorption enhancement" Opt. Lett. 35, 276-8 (2010).

C. Morhard, C. Pacholski, D. Lehr, R. Brunner, M. Helgert, M. Sundermann, and J. P. Spatz, "Tailored antireflective biomimetic nanostructures for UV applications" Nanotechnology 21, 425301 (2010).

F. Zhan, H. L. Wang, J. F. He, J. Wang, S. S. Huang, H. Q. Ni, and Z. C. Niu, "Multilayer Antireflection Coating for Triple Junction Solar Cells" Chinese Phys. Lett. 28, 047802 (2011).

A. Chutinan, N. P. Kherani, and S. Zukotynski, "High-efficiency photonic crystal solar cell architecture" Opt. Express 17, 8871-8 (2009).

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, "Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection" Nat. photonics 1, 176-9 (2007).

J. Kim, "Formation of a Porous Silicon Anti-Reflection Layer for a Silicon Solar Cell" J. Korean Phys. Soc. 50, 1168 (2007).

F. Duerinckx, I. Kuzma-Filipek, K. Van Nieuwenhuysen, G. Beaucarne, and J. Poortmans, "Simulation and implementation of a porous silicon reflector for epitaxial silicon solar cells" Prog. Photovoltaics 16, 399-407 (2008).

C. H. Chang, P. Yu, M. H. Hsu, P. C. Tseng, W. L. Chang, W. C. Sun, W. C. Hsu, S. H. Hsu, and Y. C. Chang, "Combined micro-and nanoscale surface textures for enhanced near-infrared light harvesting in silicon photovoltaics" Nanotechnology 22, 095201 (2011).

C. C. Striemer, and P. M. Fauchet, "Dynamic etching of silicon for broadband antireflection applications" Appl. Phys. Lett. 81, 2980 (2002).

C. H. Sun, P. Jiang, and B. Jiang, "Broadband moth-eye antireflection coatings on silicon" Appl. Phys. Lett. 92, 061112 (2008).

Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, and others, "Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures" Nat. Nanotechnol. 2, 770-4 (2007).

S. A. Boden, and D. M. Bagnall, "Optimization of moth-eye antireflection schemes for silicon solar cells" Prog. Photovoltaics 18, 195-203 (2010).

M. Malekmohammad, M. Soltanolkotabi, A.Erfanian, R. Asadi,; M. Zahedinejad, S. Bagheri, and M. Khaje, "Hybrid structure for efficiency enhancement of photodetectors", submitted to Appl. Surf. Sci.