Journal of the European Optical Society - Rapid publications, Vol 7 (2012)

Microlens array production in a microtechnological dry etch and reflow process for display applications

T. Knieling, M. Shafi, W. Lang, W. Benecke


The fabrication of arrays consisting of densely ordered circular convex microlenses with diameters of 126 μm made of quartz glass in a photoresist reflow and dry etch structure transition process is demonstrated. The rectangular lens arrays with dimensions of 6 mm x 9 mm were designed for focussing collimated light on the pixel center regions of a translucent interference display, which also was produced in microtechnological process steps. The lenses focus light on pixel centers and thus serve for increasing display brightness and contrast since incoming collimated light is partially blocked by opaque metallic ring contacts at the display pixel edges. The focal lengths of the lenses lie between 0.46 mm and 2.53 mm and were adjusted by varying ratio of the selective dry etch rate of photoresist and quartz glass. Due to volume shrinking and edge line pinning of the photoresist structures the lenses curvatures emerge hyperbolic, leading to improved focussing performance.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2012.12007]

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E. Stupp, and M. Brennesholtz, Projection displays (Wiley-VCH, Weinheim, 1999).

T. Knieling, M. Panitz, and W. Benecke, "Electrostatic actuated optical Fabry-Perot switches in passive matrix Displays," SPIE (5348-11), 1-11 (2004).

T. Knieling, W. Lang, and W. Benecke, "Characteristics and electrical addressing of optical Fabry-Perot Displays," SPIE (5875-20), 1-10 (2005).

Z. D. Popovic, R. A. Sprague, and G. A. N. Connel, "Technique for monolithic fabrication of microlens arrays," Appl. Optics 27 (7), 1281-1284 (1988).

E. Hecht, Optik (3rd ed., Oldenbourg-Verlag, München/Wien, 2001).

M. Born, and E. Wolf, Principles of Optics (Pergamon Press, Oxford, 1970).